CAS200 构成了Silicon Sensing的一系列双轴加速度计
CAS200和CAS290构成了Silicon Sensing的一系列双轴加速度计,在一个小的表面安装封装中提供高性能线性加速度测量。CAS200安装在电路板上,而CAS290版本安装在其侧面,这使得三个自由度的测量可以用一块电路板(PCBA)进行。
每个器件包括一个双轴MEMS传感器件和专用控制ASIC,封装在一个密封的陶瓷芯片规模封装中。测量数据和设备温度通过模拟和数字(SPI®)接口输出。
额外的内置测试(BIT)状态可从数字接口获得。有五个测量范围;±0.85g,±2.5g,±10g,±30g,±96g。精 确的线性加速度传感是通过MEMS结构形成一对正交的簧载防质量来实现的。
每个质量提供一个可变电容器的移动板,由一组交错的“手指”组成。这种结构提供了防止共振增益的关键阻尼。线性加速度导致电容的变化,这是通过解调方波激励来测量的。
每个设备都使用Silicon Sensing内部zui先进的测试设施进行设置和测试。Silicon Sensing Systems是硅MEMS陀螺仪,加速度计和惯性测量系统的市场领 导者,专注于高性能,可靠性和可负担性。凭借在惯性传感方面的强大传统,可以追溯到100多年前,所有传感器都基于内部专 利设计,这些设计是在其自己zui先进的MEMS铸造厂生产的。Silicon Sensing已经为全球数千家满意的客户提供了超过4000万个传感器,并通过技术专长和持续创新继续推动性能。
CAS200 构成了Silicon Sensing的一系列双轴加速度计
The CAS200 and CAS290 form Silicon Sensing's family of two-axis accelerometers that provide high-performance linear acceleration measurement in a small surface-mounted package. The CAS200 is mounted on a circuit board, while the CAS290 version is mounted on its side, which allows measurements of three degrees of freedom to be made with a single circuit board (PCBA).
Each device includes a two-axis MEMS sensor piece and dedicated control ASIC, packaged in a sealed ceramic chip-scale package. Measurement data and device temperature are output through analog and digital (SPI®) interfaces.
Additional built-in test (BIT) status is available from the digital interface. There are five measuring ranges; ±0.85g, ±2.5g, ±10g, ±30g, ±96g. Accurate linear acceleration sensing is achieved by forming a pair of orthogonal sprung guard masses in a MEMS structure.
Each mass provides a moving plate of variable capacitors, consisting of an interlaced set of "fingers." This structure provides critical damping to prevent resonance gain. Linear acceleration results in a change in capacitance, which is measured by demodulated square-wave excitation.
Each device is set up and tested using Silicon Sensing's state-of-the-art in-house testing facilities. Silicon Sensing Systems is a market leader in silicon MEMS gyroscopes, accelerometers and inertial measurement systems with a focus on high performance, reliability and affordability. With a strong heritage in inertial sensing dating back more than 100 years, all sensors are based on in-house patented designs that are produced at its own state-of-the-art MEMS foundry. Silicon Sensing has delivered more than 40 million sensors to thousands of satisfied customers worldwide and continues to drive performance through technical expertise and continuous innovation.
CAS200 构成了Silicon Sensing的一系列双轴加速度计
KONGSBERG | RMP201-8 |
MOOG | G771K201 H04FOFA4V14 |
ABB | REF615 |
ABB | DSAO130 |
ABB | REM615_E |
ABB | 3X47UFPBAE10A01 3BHB024711R0020 |
EPRO | PR6423/010-130+CON021 |
B&R | 4PP420.1043-75 |